Fabrication and characterization of in-situ grown epitaxial Ba_(1-x)Sr_xTiO_3 composition spreads

摘要

We have used our combinatorial pulsed laser deposition system to in-situ fabricate epitaxial Ba_(1-x)Sr_xTiO_3 thin film composition spreads on (100) LaAlO_3 substrates. Multimode quantitative microwave microscopy was used to perform dielectric characterization of the spreads at multiple microwave frequencies simultaneously. Systematic variation in dielectric properties as a function of composition is studied. The multi-mode measurements allow frequency dispersion studies. We observe strong composition-dependent dielectric dispersion in Ba_(1-x)Sr_xTiO_3.