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Assembly of thin gratings for soft x-ray telescopes

机译:组装软X射线望远镜的薄光栅

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摘要

Diffraction gratings used in space telescopes are desired to provide high diffraction efficiency and large collecting area while maintaining minimal mass to meet cost limitations. As a result, the method of assembling such gratings into modules such that all requirements are met becomes critical. We report on the development of a new assembly scheme that densely stacks thin reflection grating substrates using precision spacers. A custom-designed, optically-polished vacuum chuck is used to constrain the substrates for grating surface metrology during assembly. This rigid subassembly composed of the vacuum chuck and grating is manipulated in space until the grating surface final angular and lateral positions are obtained, at which point the grating is transported from the chuck onto the spacers and glued in that final position. This method not only precisely aligns the gratings with respect to each other, but also improves the overall surface flatness of the substrates, since they are constrained by a flat vacuum chuck within the assembly process. This helps reduce the tolerances on the substrate shaping methods followed prior to assembly.
机译:期望用于空间望远镜的衍射光栅提供高衍射效率和大收集面积,同时保持最小质量以满足成本限制。结果,将这种光栅组装到模块中以满足所有要求的方法变得至关重要。我们报告了一种新的组装方案的发展,该方案使用精密垫片密集地堆叠了薄反射光栅基板。定制设计的光学抛光真空卡盘用于约束基板,以在组装过程中进行光栅表面计量。在空间中操纵由真空吸盘和光栅组成的刚性子组件,直到获得光栅表面的最终角度和侧向位置,此时光栅从吸盘传输到垫片上并在该最终位置粘合。该方法不仅使光栅相对于彼此精确对准,而且由于在组装过程中它们受到平坦真空吸盘的约束,因此还改善了衬底的整体表面平整度。这有助于减小组装前遵循的基板成型方法的公差。

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