EXTRACTION OF FREQUENCY DEPENDENT MACRO-MODELSFOR GAS DAMPING AND SPRING EFFECTS FOR MEMS DEVICES

摘要

In this paper, we present an efficient macromodel extractionrntechnique for gas damping and spring effects for arbitrarilyrnshaped geometry. The technique applies an Arnoldi-basedrnmodel-order-reduction algorithm to generate low-order modelsrnfrom a FEM approximation of the linearized Reynolds equation.rnWe demonstrate that this approach for generating thernfrequency-dependent gas-damping model is more than 100rntimes faster than previous approaches, which solves thernlinearized Reynolds equation using a transient finite-elementrnmethod. The low-order gas-damping model can be easilyrninserted into a system-level modeling package for transient andrnfrequency analysis. The simulated results are in goodrnagreement with experimental results for four different devices.