A 0.8μm CMOS INTEGRATED SURFACE MICROMACHINED CAPACITIVE PRESSURESENSOR WITH EEPROM TRIMMING AND DIGITAL OUTPUT FOR A TIRE PRESSUREMONITORING SYSTEM

摘要

The development of an integrated process for themerging of a surface micromachined capacitive pressure sensorwith a 0.8 μm CMOS double metal, double polysilicon process isreported in this paper. A number of innovative pressure sensordesigns with improved pressure linearity have been fabricated withthis process. Designs with internal anchors and an optimum signalprocessing algorithm have demonstrated significant improvementsin pressure linearity over more conventional designs. The systemarchitecture and circuit implementation using EEPROM forpressure and temperature calibration are described. The results ofthe pressure and temperature behavior of the integrated sensors aredescribed.