MICROSCALE ELECTROLYTIC PROBES, WITH INTEGRATEDTEMPERATURE SENSORS, FOR NANO- TO MICRO-LITER FLUID VOLUMES

摘要

Electrolytic conductivity measurements of fluids currentlyrequire sample volumes greater than a milliliter. Many applicationswould benefit from accurate measurements for nano- to microlitersample volumes. However, polarization and non-linear electrodeimpedance, along with stray impedance’s and temperature effects,strongly affect measurements of the solution resistance formicroliter and smaller sample volumes. MEMS-based Sielectrolytic conductivity probes, down to 50 μm wide, withintegrated temperature sensors have been designed and fabricatedto mitigates these issues. The accuracy of normal scale probes isachieved with these sensors over 3 orders of magnitude in solutionconcentration.