NEW PLASTIC MICROINJECTION MOLDING TECHNIQUE FOR EXTREMELYTALL PLASTIC MICROSTRUCTURES USING REMOTE INFRARED RADIATIONHEATING METHOD

摘要

Microfabrication methods using polymers are becomingincreasingly popular as low-cost and high volume productionalternative to silicon or glass-based MEMS technologies. In thispaper an innovative plastic microinjection molding technique usingrapid thermal processing (RTP) for the fabrication of high aspectratio plastic microstructures is reported. This technique focuses ondecreasing the cycle time of injection molding of high aspect ratiomicrostructures and at the same time to achieve better fill andreproducibility of the micromold. In this work the RTP processhas been implemented and characterized using Cyclic olefincopolymers (COC), Polycarbonate (PC) and Poly methylmethacrylate (PMMA) and high aspect ratio plastic structures(taller than 100μm) such as plastic micro needles and fluidic microchannels have been realized.