We report on the growth of molybdenum and vandium oxide films, i.e., MoO_3, V_2O_5, and V_6O_13, adn their application as positive electrodes in lithium microbatteries. We have characgterized various polycrystalline samples and studied how their structural and electrical properties are affected by thedifferent preparation conditions. The highest quality films were grown on silicon substrte maintained at 250 deg C and annealed at 300 deg C. It is shown that the growth conditions play an important role inthe electrochemical properties of the film. Both thermodynamic and kinetic parameters are strongly dependent on film morphology and stoichiometry. Microbtteries facbricted with cathodes formed at moderate temeperature ahve shown a volumetric capacity about 80 #mu#Ah/#mu#m/cm~2. The cells exhibit a monotonous discharge profile indicaing that the cathode materials remain single phase even for a large degree of itnercalation.
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