Pd,Pt and ZrO_2-pt Films Prepared by Mocve and Their Electrochemical Properties

摘要

Pd, pt and ZrO_2-Pt films were prepared by metal orgainc chemical vapor deposition as electrodes for zirconia solid electrolyte and their electrochemical properties were examined by impedance spectroscopy. Carbon containing films considsted of agglomerated fine particles exhibit higher electrode conductivities than that of conventional Pt paste electrodes at temperatures below 873K. The singering of the fine particles and/or oxidation of impurity carbon or Pd spoil their electrochemical performance. On the other hand, two-phase ZrO_2-Pt films show promise as electrode material for zirconia electrolyte at low temepratures because of their higher conductivity than Pt paste electrodes and their thermal stability.