Synthesis of SuRuO_3 by Sol-Gle Processing

摘要

Electronic conductive oxide SrRuO_3 has been synthesized by sol-gel processing. Various precursors were tested and fourr different processing methods were developed. Stable SrRuO_3 sols were obtained using these four porcessing methods with various precursors. It was found that partial hydrolysis of strontium precuresosr was required to achieve a cross-condensation of ruthenium and strontium, so as to obtain a single phase SrRUO_3 perovskite at relatively low teperatures. The stable sols were either poured into petri-dishes to form xerogels or dip-coated on substrates to form thin films. Single phase SrRUO_3 perovskite was obtained after heattreatment at 800 deg C or higher temperatures. TGA/DTA, XRD and SEM were applied to characterize sol-gel derived SrRUO_3 ceramic powders and films.