MEMS based on III-V-compounds for sensing applications and opticalcommunication

摘要

Recent developments in micromachining techniques based onnIII-V-compounds have led to the fabrication of new sensing and actuatorndevices for a variety of applications in control and measurement systemsnas well as in optical communication. This work reports on variousnIII-V-based MEMS concepts for sensing applications in the fields ofnmechanical engineering, microwave electronics and WDM systems fornoptical communication. The described devices include integratednGaAs/AlGaAs pressure sensors, thermoelectrical sensors for gas flow,ninfrared detection and RF power measurement. Micromachined Fabry-PerotnFilters for dense WDM systems illustrate the integration ofnelectromechanical and optical functions