A Precise Sensor for SF_6 Based on Piezoelectric Ultrasound

摘要

Based on piezoelectric ultrasound technology, the paper theoretically analyses the determination of gas concentration and presents a norm-contrast method, which is realized by high-speed chip CPLD (Complex programmable logic device), to determine the concentration of SF_6 accurately with air as background. It is proved that this sensor can determine the concentration of SF_6 with the precision of 50 μg/g. The sensor is in the process of producing.