Electroless Metallization of Silicon Using Metal Nanoparticles as Catalysts and Binding-Points

摘要

Gold nanoparticles on silicon work not only as catalysts to initiate autocatalytic electroless metal deposition but also as binding-points between the deposited metal film and the silicon surface. Conventional catalysts of autocatalytic electroless metal deposition, such as palladium and silver, require heat treatments or anchor formation to obtain practical adhesion of deposited metal films on silicon. Gold nanoparticles can directly produce adhesive metal films on flat silicon surfaces without any treatments. Cross-sectional transmission electron microscopic observation reveals that gold nanoparticles form an alloy with silicon at the room temperature. This alloy is expected to improve the adhesion of metal film on silicon.