Raman scattering as an in-situ optical diagnostic

机译：拉曼散射作为原位光学诊断

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Abstract: Raman microprobe scattering is shown to be a useful noninvasive real-time probe during thin film processing. Applications during laser-assisted processing that are relevant to microelectronics are emphasized.!34

机译：摘要：拉曼微探针散射被证明是薄膜处理过程中有用的无创实时探针。强调了激光辅助处理中与微电子学相关的应用！34

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《Process Module Metrology, Control and Clustering》|1991年|p.298-305|共8页
会议地点 San Jose CA(US);San Jose CA(US)
作者
Irving P. Herman; Columbia Univ.; New York; NY; USA.;
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正文语种 eng
中图分类无线电电子学、电信技术;
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2. In-situ reversible temperature-dependent surface enhanced Raman scattering study using optical fibers [J] . Yang X., Wang D., Zhu J., Chemical Physics Letters . 2010,第1a3期

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3. In-situ Raman Scattering Spectroscopy for a Super Resolution Optical Disk during Readout [J] . Masashi Kuwahara, Takayuki Shima, Paul Fons, Applied physics express . 2009,第8期

机译：读取过程中超分辨率光盘的原位拉曼散射光谱
4. Raman scattering as an in-situ optical diagnostic [C] . Irving P. Herman Conference on process module metrology, control, and clustering . 1992

机译：拉曼散射作为原位光学诊断
5. Development of Raman and Thomson scattering diagnostics for study of energy transfer in nonequilibrium, molecular plasmas. [D] . Lee, Wonchul. 2003

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机译：生物光子学精选专题的特别部分：光学相干断层扫描和生物分子成像与相干拉曼散射显微镜：生物成像与相干拉曼散射显微镜：教程
7. On-line In-situ Diagnostics of Processes within PEM Fuel Cells by the Application of a Raman Fiber Technique [O] . Bettermann H., Fischer P. 2010

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机译：可转换校准标准开发用于高压火焰中的定量拉曼散射诊断

Raman scattering as an in-situ optical diagnostic

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