DESIGN, FABRICATION, AND TESTING OF A MOVING MAGNET ACTUATOR FOR LARGE RANGE NANOPOSITIONING

摘要

Moving magnet actuators are promising candidates for achieving nanometric motion quality over a large (10mm) motion range. Large range nanopositioning capability addresses an important instrumentation need in several areas of nanotechnology. In pursuit of this goal, we present an optimal moving magnet actuator design integrated with a double parallelogram flexure bearing and thermal management system. The proposed design is systematically optimized in the context of fundamental actuation- and system-level performance tradeoffs that we have identified. The overall system is custom-fabricated and tested to validate the desired actuation performance. Preliminary closed-loop results highlight the proposed actuator's potential for large range nanopositioning.