OPTICAL ALIGNMENT OF SAMM TO REDUCE COSINE ERROR

摘要

The Subatomic Measuring Machine [1-3] has positioning resolution near 10 picometers over a 25 mm X-Y range. In order to reduce the position errors due to the interferometer-laser-mirror misalignments, steps are taken to bring the cosine errors [4] to within a few nanometers across the range of motion. This report gives an overview of the optical techniques used to verify the critical sub-minute laser alignments.