HYBRID SYSTEMS FOR HIGH ACCURATE TRAJECTORY TRACKING WITH SUB NANOMETER RESOLUTION

摘要

Hybrid actuator systems consisting of traditional electric motor drives combined with piezo or voice coil short stroke actuators provide very high resolution motion and positioning. The extreme high resolution results from the well guided short stroke actuator. The simultaneous control of such multi actuator systems requires cascade control loops or mesh coupled state space control. With a single high resolution incremental encoder in the control loop of both actuators the systems can achieve sub-nanometer resolution and stability.