Structure and mechanical properties of Cr–Zr–N films synthesized by closed field unbalanced magnetron sputtering with vertical magnetron sources

摘要

In this work, ternary Cr1–xZrxN films with 0≤x≤0.34 were synthesized by closed field unbalanced magnetron sputtering (CFUBMS) with vertical magnetron sources and their crystalline structure, morphology and mechanical properties as a function of Zr content (x value) were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), nanoindentation and wear tests. The results reveal that the structure and mechanical properties of films were found to depend strongly on the Zr content. As the Zr content increases, the more dense and compact microstructure is developed and the surface roughness is greatly decreased. Also, the mechanical properties including hardness (maximum hardness: 34 GPa) and wear property are largely improved in comparison with CrN film. These enhancements on the mechanical properties of Cr1–xZrxN films could be attributed to the solid solution hardening.