Development of the Roll Type Incremental Micro Pattern Imprint System for Large Area Pattern Replication

摘要

Flexible display has been attracting attention in the research field of next generation display in recent years. And polymer is a candidate material for flexible displays as it takes advantages including transparency, light weight, flexibility and so on. Rolling process is suitable and competitive process for the high throughput of flexible substrate such as polymer. In this paper, we developed a prototype of roll-to-flat (R2F) thermal imprint system for large area micro pattern replication process, which is one the key process in the fabrication of flexible displays. Tests were conducted to evaluate the system feasibility and process parameters effect, such as flat mold temperature, loading pressure and rolling speed. 100 mm × 100 mm stainless steel flat mold and commercially available polycarbonate sheets were used for tests and results showed that the developed R2F system is suitable for fabrication of various micro devices with micro pattern replication on large area.