首页> 外文会议>Photon Processing in Microelectronics and Photonics V >Fabrication of Periodic Arrays of Top-Gathering Titania-organic Hybrid Pillars Derived from Multi-beam Laser Interference
【24h】

Fabrication of Periodic Arrays of Top-Gathering Titania-organic Hybrid Pillars Derived from Multi-beam Laser Interference

机译:多光束激光干涉产生的高聚集性二氧化钛-有机混合柱的周期性阵列的制备

获取原文
获取原文并翻译 | 示例

摘要

Multi-beam laser interference (MLI) lithography is known to be one of the fabrication techniques of photonic crystals. In MLI lithography, laser beams are interfered on a scale of the wavelength of light and are irradiated to photosensitive films. We have paid attention to photosensitive TiO_2-organic hybrid film, which has high refractive index. TiO_2-organic hybrid periodic pillar patterns were fabricated by MLI lithography. The TiO_2 hybrid film, which was prepared from Ti-alkoxide and β-diketone by the sol-gel method, was exposed to the interference pattern of femtosecond pulses at 800 nm wavelength. After laser irradiation, the unirradated portion was removed by the development and rinse. Two-dimensional periodic standing alone pillars and 2x2 and 3x3 top-gathering pillars, which were gathered at the top by means of self-organization were formed by changing conditions such as laser irradiation time and film thickness. The pillar patterns depended upon the rinse liquid, the diameter, and the height of pillars. The top-gathering pillars are applicable for diffractive optics.
机译:众所周知,多光束激光干涉(MLI)光刻是光子晶体的制造技术之一。在MLI光刻中,激光束在光的波长尺度上被干涉并且被照射到感光膜上。我们一直关注具有高折射率的光敏性TiO_2-有机杂化膜。利用MLI光刻技术制备了TiO_2-有机杂化周期柱图案。由钛醇盐和β-二酮通过溶胶-凝胶法制备的TiO_2杂化膜暴露于波长为800 nm的飞秒脉冲的干涉图样。激光照射后,通过显影和冲洗除去未照射的部分。通过改变诸如激光照射时间和膜厚之类的条件,形成通过自组织聚集在顶部的二维周期性独立立柱以及2x2和3x3顶部聚集柱。柱的图案取决于冲洗液,柱的直径和高度。顶部聚集柱适用于衍射光学。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号