Fabrication of Multilayer Passive Electric Components using InkJet Printing and Low Temperature Laser Processing on Polymer

摘要

The low temperature fabrication of passive electrical components (conductor, capacitor) on the flexible polymer substrate is presented in this paper. A drop-on-demand (DOD) ink-jetting system was used to print gold nano-particles suspended in Alpha-Terpineol solvent and PVP in PGMEA solvent to fabricate passive electrical components on flexible polymer substrate. Short pulsed laser ablation enabled finer electrical components to overcome limitation of inkjet process. Continuous Argon ion laser was irradiated locally to evaporate carrier solvent as well as to sinter gold nano-particles. In addition, a self alignment technique for PVP layer was demonstrated taking advantage of the deliberate modification of surface wetting characteristics. Finally, a new selective ablation of multilayered gold nanoparticle film was demonstrated using the ablation threshold difference for sintered and non sintered gold nanoparticles.