Phase behavior of polymer blend materials for polystyrene-bpolycarbonate (PS-b-PC) block copolymers and corresponding homopolymer polystyrene

摘要

Block copolymer directed self-assembly (DSA) is a promising technique to print Contact Holes/Vias with polymer blendmaterials or block copolymers. Polymer blend material is to mix block copolymer and homopolymer. In this paper, thematerials we use are polymer blend materials with polystyrene-b-polycarbonate (PS-b-PC) block copolymer andcorresponding homopolymer polystyrene. The advantage of polymers is that they do not require complex moleculardesign and can form cylindrical structures as long as the proportions are right. The polymer can be mixed and usedimmediately without waiting time. Based on the PS-b-PC which can form a stable lamellar structure, we achieve acontrollable cylindrical structure by mixing the two materials and controlling the concentration. After multiplecomparison experiments, the phase segregation results of PS-b-PC with PS ratio of 2:1 and 1.5:1 were better, with thediameter about 12.7nm and 14.1nm, and the pitch about 20nm and 22.7nm, respectively.