Electromagnetic and structural FEA modeling of induction actuated scanning mirrors

摘要

The prediction of the behavior of the induction actuated scanners is a problem that involves the modeling of different physical domains as structural and electromagnetic. The Finite Element Approach is a highly viable alternative to obtain reliable predictions for its behavior over other available methods as the analytic, or circuit equivalent methods. In this work a finite element model for the structural an electromagnetic domains of the induction actuated scanning mirror was presented. To validade these models two experiments were performed, a laser doppler vibrometry of the double-rotor scanner to identify its modes shapes and natural frequencies and a magnetic field mapping of the actuator to obtain the spatial characteristic of the AC and DC magnetic fields generated by the actuator in the device armature region. There is a good agreement between the FEA models and the experimental results.