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Cesic~R and silicon - a perfect combination for high performance applications

机译:Cesic〜R和硅-高性能应用的完美组合

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Future novel optical systems, for example for EUV lithography and spectroscopy or X-ray applications, must achieve high optical performance, resulting in stringent requirements on stiffness and stability of the mounted optics.On the example of silicon pore optics the combination of an isotropic composite ceramic material and silicon could meet these requirements. In this paper it will be shown that especially for space applications the combination of Cesic~R and silicon is advantageous, due to the excellent mechanical properties of Cesic~R being used for the structural elements. This combination is especially suitable due to the match of the low coefficient of thermal expansion (CTE) between both materials. In such a way it is possible to develop, even with two different materials, a thermally stable system that can function as an optic even at cryogenic temperatures and does not require any adjustment mechanisms. This paper will discuss the material properties, present results on concrete applications for potential astrophysical science missions and show some conceptual designs and applications of this material combination for future space missions.
机译:未来的新型光学系统,例如用于EUV光刻和光谱学或X射线应用的光学系统,必须实现高光学性能,从而对已安装光学器件的刚度和稳定性提出了严格的要求。在硅孔隙光学器件的示例中,各向同性复合材料的组合陶瓷材料和硅可以满足这些要求。在本文中将显示,特别是对于空间应用,由于Cesic_R的优异机械性能被用作结构元件,因此Cesic_R和硅的组合是有利的。由于两种材料之间的低热膨胀系数(CTE)匹配,因此这种组合特别合适。以这种方式,即使使用两种不同的材料,也可以开发一种热稳定的系统,该系统即使在低温下也可以充当光学器件,并且不需要任何调节机构。本文将讨论材料的性质,介绍潜在天体科学任务在具体应用中的结果,并展示这种材料组合在未来太空任务中的一些概念设计和应用。

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