University of Eastern Finland, Institute of Photonics, Yliopistokatu 7, P.O. BOX 111, 80101 Joensuu, Finland;
University of Eastern Finland, Institute of Photonics, Yliopistokatu 7, P.O. BOX 111, 80101 Joensuu, Finland;
Department of Micro and Nanosciences, Aalto University, FI-00076 Aalto, Finland;
University of Eastern Finland, Institute of Photonics, Yliopistokatu 7, P.O. BOX 111, 80101 Joensuu, Finland;
Department of Micro and Nanosciences, Aalto University, FI-00076 Aalto, Finland;
University of Eastern Finland, Institute of Photonics, Yliopistokatu 7, P.O. BOX 111, 80101 Joensuu, Finland;
University of Eastern Finland, Institute of Photonics, Yliopistokatu 7, P.O. BOX 111, 80101 Joensuu, Finland;
University of Eastern Finland, Institute of Photonics, Yliopistokatu 7, P.O. BOX 111, 80101 Joensuu, Finland;
Titanium dioxide; propagation loss measurements; atomic layer deposition;
机译：通过原子层沉积制造的低损耗二氧化钛带状波导
机译：低损耗光波导，用于来自原子层沉积的具有Al_2O_3薄膜的近紫外和可见光谱区域
机译：氧源原子层沉积制备二氧化钛薄膜的X射线光电子能谱分析及退火效果
机译：通过二元原子层沉积工艺的组合，Pb（Zr，Ti）O×X薄膜的原子层沉积
机译：通过原子层沉积制备银催化剂以及使用Operando表面增强拉曼光谱研究原子层沉积反应。
机译：用于近紫外线的低损耗光波导和来自原子层沉积的Al2O3薄膜的可见光光波导
机译：通过原子层沉积的低损耗钛二氧化硅条带波导
机译：通过后沉积微结构修改制备低损耗光波导。
