Piezoelectric Microcantilevers of Nanoscale Thickness for Detection of Cells

摘要

The primary goal of the Microfabricated Cell Sensor project is to fabricate microcantilever beams composed of thin films of Lead Zirconium Titanate (PZT), silicon oxide, metal, and a Biotin/Avidin complex. The structures will function as cell sensors based on measurements of the voltage difference produced from the stressed PZT when cells adhere to the cantilevers. The sensor will be used to detect bacterial cells, and in particular, E-Coli. While the process involves fabrication of microcantilevers, it also explores the possibilities of infusing electrically active biological molecules that can aid in inducing electricity in conjunction with the piezoelectric material being used.