TRIBOLOGICAL STUDIES OF DLC FILMS CONTANING DIFFERENT AMOUNT OF SILICON COATED BY REACTIVE ION PLATING

摘要

In order to synthesize DLC film on WC-Co alloy, C_6H_6 and (CH_3)_6Si_2O mixture was used by employing ion-plating apparatus. The Si content in DLC film was varied arranging the mixture ratio of both gases. The film thickness of about 1 μm was obtained. Friction and wear experiments were conducted by using a reciprocating ballon-plate system under relatively dry atmosphere (RH: 20% +-5%). Fairly small friction coefficients (0.06-0.15) and specific wear rates (l-4x10~(-7)) were observed. When the Si content was increased above 5.9 at. % Si, tribological properties were deteriorated. The film containing about 1.6 at. % Si gave relatively good tribological results.