Protein mass detection system in liquid for prostate-specific antigen (PSA) using PDMS liquid cell by resonant frequency shift of micromachined PZT cantilever

摘要

In this paper, we developed a new novel cantilever-based nanomechanical biosensor for the real time electrical measurement of protein-protein interaction. Micromachined PZT thin film cantilever composed of SiO_2/Ta/Pt/PZT/Pt/SiO_2 on SiN_x supporting layer for the electrical detection was fabricated. Fabricated cantilever was integrated with PDMS bilayer with channel and reservoir for measuring in liquid environment. We present here the resonant frequency change of piezoelectric microcantilevers in liquid due to antigen-antibody interaction of fPSA.