Optical detection of concentrations for mixed acid: HF and HNO_3

摘要

Mixed acid, which consist of HF and HNO_3, is used as a good etchant for silicon dioxide in the wet etching and pickling process of stainless steel. The optical detection of concentration for such mixed acids is crucial to optimize and cut costs in the manufacturing process. Optical detection in the IR regime has been utilized to measure the concentration of the mixed acid for HF and HNO_3, because that has several strong absorption peaks, which is contributed by vibrational mode of each acid molecular in this spectrum. In this research, we observed the concentrations of mixed acid to consist of HF and HNO_3, as we measured the absorption intensity of OH- stretch and NO_3 stretch band by optical spectroscopy. The concentration range of HF over 1.5-3 wt% and that of HNO_3 over 2-10 wt% were studied in room temperature.