EFFECTS OF THE FEEDFORWARD COMPENSATION IN THE CONTROL OF MICROMETRIC ACCURACY LINEAR MOTORS

摘要

The paper discusses the effects of the velocity and acceleration feedforward compensation gains in the control of a prismatic axis for micrometric accuracy applications actuated by a brushless linear motor. The work is based on experimental tests; the considered prismatic axis is equipped with a cog-free linear motor, high-precision linear bearings and an optical linear encoder with a resolution of 0.1 μm and a range of motion of 75 mm. The aim of the work is to study the influence of the feedforward compensation gains on the time history of the following error of the linear axis, considering both its maximum value and the oscillation due to the stick-slip phenomena of the linear bearings. The experimental results are discussed.