A program based on the analysis of the local atom displacements measured from high resolution electron microscopy images has been applied to the analysis of the quality of GaAs/GaP superlattices.Features such as the homogeneity of the layers or the strain distribution are analysed by means of the grey map representation of the interatomic distances and bond angles.The results show that the GaAs layers are not homogeneous,tending to reorganise and produce accumulations in some regions.
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