Simultaneous and Wireless measurement of CO_2 and Humidity using a SAW reflective delay line

摘要

A 440MHz wireless and passive surface acoustic wave (SAW) based chemical sensor was developed for simultaneous measurement of CO_2 gas and relative humidity (RH) using a reflective delay line pattern as the sensor element. The reflective delay line was structured by an inter-digital transducer (IDT) and several shorted grating reflectors positioned both sites of the IDTs along the SAW propagation direction. A Teflon AF 2400 film with large solubility, permeability, and selectivity towards to CO_2 and a hydrophilic SiO_2 layer for water vapor sensing are used as the sensitive film and deposited onto the piezoelectric substrate. A simulation on the SAW device was performed using the coupling of modes (COM). The measured reflection coefficient S_(11) in time domain of the fabricated SAW device shows sharp reflection peaks with high signal-to-noise (S/N) ratio, small signal attenuation, and few spurious peaks. During the CO2 and humidity testing, high sensitivity (～2° ppm~(-1) for CO_2 detection and 7.45°/%RH for humidity sensing), good linearity and repeatability were observed in the CO_2 concentration of 50～400ppm and humidity of 20～80%RH. Temperature and humidity compensations were also investigated during the sensitivity evaluation process.