Implementation of a standardized 0.35-um WLR test vehicle

摘要

Abstract: The first global demonstration of wafer-level reliability (WLR) test structure and methodology effectiveness is in progress. This action, initiated by an organization of fabless companies and concentrated on foundry service providers, represents a market-driven effort. WLR has been discussed, evaluated, promoted and even made a requirement in semiconductor IC procurement documents. This project utilizes a common suite of WLR structures fabricated at most commercial foundries to demonstrate the effectiveness of WLR structures for use as process monitors. !16