In-process surface roughness measuring device for information-based real-time polishing process adjustment and optimization

摘要

In this paper we present a feasible variant of a device for in-process roughness measurement during an optical polishing process. The system, already presented as Tirm respectively I-Tirm, has been technically varied and can now be integrated into almost any lever polishing process with little effort. This enables new possibilities regarding real-time optical manufacturing process monitoring and optimization.