The Structure Design and Simulation Of The Ring Resonator Based On SOI Planar Optical Waveguide For The Micro Biochemical Sensor

摘要

A ring resonator based on Silicon-on-Insulator (SOI) planar optical waveguide for micro biochemical sensor application is designed and simulated in this paper. The SOI optical waveguide is made with a ridge structure. According to the optical waveguide mode theory and the performance of the ring resonator, the size of the single mode ridge waveguide and the structure of the ring resonator are obtained. Based on the structure principle and the transmission mechanism of electric field of the ring resonator, the power transfer function and the parametric equation of sensitivity are derived. As a result, the value of Q of the ring resonator can reach 10~3 magnitudes. At last, the structure and the transmission mechanism of electric field in the ring resonator are simulated in MATLAB software.