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A simple processing sequence for selective emitters Si solar cells

机译:选择性发射器的简单处理序列Si太阳能电池

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A novel method to form selective emitters in only one diffusion step without etching or masking steps has been recently introduced for Si solar cells. A phosphorous containing doping source is applied selectively to the front side of a p-type crystalline Si substrate in the form of a paste and subsequently dried. The print is performed with advanced screen printing equipment that allows very precise positioning. In only one diffusion step, deeply diffused regions form under the printed doping source. At the same time, the adjacent regions become weaker doped by P atoms diffusing indirectly from the printed source through the gas ambient into those regions that were not covered by the P paste. The advantages of such a processing sequence over typical industrial processes are addressed. Results from an ongoing optimisation of such a sequence are given and interpreted
机译:最近仅引入仅在不蚀刻或掩蔽步骤的一个扩散步骤中形成选择性发射器的新方法已经用于Si太阳能电池。 含磷掺杂源以糊状物的形式选择性地施加到p型结晶Si衬底的前侧并随后干燥。 通过允许非常精确定位的高级丝网印刷设备进行打印。 在仅一个扩散步骤中,在印刷的掺杂源下形成深度扩散区域。 同时,通过通过气体环境间接地从印刷的源间接地扩散到不被P浆料覆盖的那些区域中掺杂的相邻区域变弱。 解决了这种处理序列在典型的工业过程中的优点。 给出并解释了持续优化这种序列的结果

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