Noise Model Analysis of MEMS Gyroscope Circuit Control System

摘要

The detection signal of MEMS resonant gyroscope is very weak, and it is sensitively affected by the mechanical structure and the noise of the detection circuit. Noise is an important parameter which affecting gyroscope resolution, angle random walk coefficient and zero partial stability. In this paper, the noise model is established for the front-end solitary circuit, filter circuit, ADC/DAC and other key circuit modules of the gyro control system drive closed loop and sense closed loop, through the mathematical theory, the paper deduces the noise of the key circuit module, instructs the control system parameter design, and gives the corresponding simulation results.