Laser fabrication of micro sized diffractive and refractive optical devices in fused silica and glass

摘要

Laser ablation has proved to be a flexible method for direct micro-structuring of micro-mechanical, micro-fluid or micro-optical components. Transparent dielectric materials such as quartz, sapphire, fluorides and technical glass like Pyrex are suitable for a wide field of applications due to their outstanding chemical, optical, and mechanical properties. On the other hand, these materials are difficult to process with conventional lasers (e.g. excimer laser) as a consequence of the low absorption of the wavelength (e.g. 248 run).