Performance Analysis of Junctionless Accumulation Mode Bulk FinFET with varying Fin Shape

摘要

In order to overcome the short channel effects because of the scaling of MOSFETs, FinFET structure has been a proven modification of the classical structure of MOSFETs. But any variation of the fin cross-sectional shape due to fabrication has an impact on the device performance. In this paper, we have evaluated the impact of fin cross-section shape on junctionless accumulation mode bulk FinFETs with thin fins and short channel length. We have shown that fin shape has considerable impact on performance of the device.