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THERMAL AFFECTS OF MATERIAL MICROPROCESSING AS A FUNCTION OF PULSEWIDTH SPANNING THE PICOSECOND REGIME

机译:材料微处理作为跨越皮秒跨越的函数的热影响

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摘要

The main utility of ultrafast (picosecond and femtosecond) pulsewidths in laser material processing applications is the ability for heat-free ablation. Heatfree, however, is not universally guaranteed for all pulsewidths and all materials. Every material has a unique single-pulse "athermal" time constant that is associated with the electron-phonon interaction time of the material and typically ranges from short picosecond to very long picosecond. Furthermore, the orders of magnitude of the time constants are generally dependent upon the material class, such as metal, semiconductor, or dielectric, so a pulsewidth that is "athermal" for one material may not be for another. Even armed with this knowledge cold ablation can still yield heat-affects when certain processing parameters allow for incubation to build up heat in the material. We present here an in depth study of the heat-affects on a variety of materials as a function of pulsewidth across the entire picosecond regime. Both single-pulse and multi-pulse incubation affects are discussed. The materials we investigate include metals such as stainless steel and aluminium, semiconductors (silicon), aluminosilicate glass, and polymers. We report both the threshold for ablation, as well as the size and quality of the heat-affected-zones as a function of pulsewidth from 2 to 500 picoseconds.
机译:超超速(PICOSECOND和Femtosecond)脉冲宽度在激光材料加工应用中的主要效用是无热消融的能力。然而,热情不受所有脉冲宽度和所有材料的普遍保证。每个材料都具有独特的单脉冲“滴度”时间常数,该时间常数与材料的电子 - 声子相互作用时间相关联,并且通常从短的PICOSECOND到非常长的PICOSECOND之间的范围。此外,时间常数的级通常取决于材料类,例如金属,半导体或电介质,因此对于一种材料是“滴管”的脉冲宽可能不是另一个的脉冲宽。甚至在这种知识中均匀武装冷热仍然可以产生热影响,当某些处理参数允许孵育以在材料中积聚热量时。我们在这里介绍了在整个Picosecond制度的脉冲宽度的各种材料上的热量影响的深度研究。讨论单脉冲和多脉冲孵育影响。我们研究的材料包括金属,例如不锈钢和铝,半导体(硅),硅铝硅酸盐玻璃和聚合物。我们报告了消融的阈值,以及热影响区域的尺寸和质量,作为脉冲宽度的函数,从2到500皮秒。

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