A soft X-ray beamline for quantitative nanotomography using ptychography

摘要

Soft X-ray nanotomography using ptychography allows quantitative imaging of the internal structure of biological and materials samples with high sensitivity. In this work, we describe progress toward the implementation of an interferometer-controlled microscope located at a beamline that provides coherent flux over the photon energy range of 200 to 2000 eV. Recent experimental results are presented to illustrate the potential for two- and three-dimensional imaging at the nanoscale.