Sub-Nanometer Resolution for the Inspection ofReflective Surfaces Using White Light

摘要

The quality control of highly reflective surfaces requires a measurement method which is able to resolve the surface shape in the nanometer range. Different methods have been developed in the past, e.g. based on interferometry or by tactile coordinate measurement machines. However, most of them do not match the industrial need for a fast method which is insensitive to environmental disturbance.