A novel method of lens initial structure selection: study on structures-aperture relationship of finite image distance achromatic spherical microscope objective with larger numerical aperture

摘要

A number of finite image distance achromatic spherical microscope objectives with larger numerical aperture are collected. And the lens system structures are analyzed statistically based on optical design experience. Then a quantitative formula of the relationship between system structure and deflection angle on finite image distance achromatic spherical microscope objective, whose deflection angle is up to 0.3, is proposed. A optical systems for microstructure inspection is obtained on the basis of the fruit. The high resolution system with simple structure is achieved. Accordingly the efficiency of initial structure selection study on achromatic microscope objective (deflection angle up to 0.3) is validated.