Scatterometry, OCD, reference standard, CD metrology, GISAXS, tool matching, rigorous modelling

摘要

Large-scale synchrotron and neutron research infrastructures offer unrivalled performance for the advanced characterisation of micro- and nano-electronic devices and systems. Examples include X-ray spectroscopy to study RRAM switching mechanisms, grazing incidence X-ray scattering and neutron reflectivity for structural data on materials for interconnections, hard X-ray PES to understand electronic properties of layered materials, and nano- and micro-X-ray-tomography for unprecedented non-destructive 3D imaging of packaging, vias, etc.