Characterization of Nano-Crystalline Diamondlike Carbon (DLC) Films with Substrate Temperature Using Dense Plasma Focusing Method

摘要

Nano-crystalline Diamond like Carbon (DLC) film has been grown by Dense Plasma Focusing Method (DPF) using pure graphite Plasma, on different substrate (glass/silica) at different substrate temperature. The films were grown at substrate temperature 100°C, 150°C & 300°Cby the high dense plasma of energy 1.3 k Joule on glass and silica. Raman spectra confirmed that sp~3 content is grown in the films under various conditions. The Raman spectra of these films show a broad asymmetric peak which narrow with decreasing sp~2 contents. We believe that our data presented here may be used as reference of DLC characterization.