Research on The Fabrication Process and Failure Model of Bulk Micromechanical Velcro

摘要

In the isotropic and anisotropic etching bulk micromechanical fabrication process, the micromechanical velcro is a microstructure used to surface mechanical attaching with high-density array rule. However the failure of occlusion is always a problem. From the bulk micromechanical velcro's structure and its fabrication process, a mechanical model is built for analysing the occlusion failure problem. Experiments have been done based on the theoretical Study.