Densification of metal oxide films synthesized from a metal complex by flame apparatus

摘要

In this study, we synthesized dense metal oxide films from a metal-ethylenediaminetetraacetic acid complex using a flame spray apparatus. Erbium oxide (Er_2O_3) films were synthesized on stainless steel (SUS) substrates using N_2, N_2+O_2 (air), or O_2 as the carrier gas and a H_2-O_2 mixture as the combustion gas. When O_2 was used as the carrier gas, a 19.6-μm-thick Er_2O_3 layer was deposited on the SUS substrate. The cross-sectional porosity of this film was 3%. In contrast, a 5.2-22.0-μm -thick Er_2O_3 layer was synthesized on SUS substrates when N_2 and air were used as the carrier gases. The cross-sectional porosities of these films were 5.9-23.4%. These results indicated that the carrier gas used during the synthesis process plays an important role in determining the thickness and porosity of the resulting film.