A monitoring system for electron beam processes for visualisation, beam alignment and process control

摘要

For sophisticated applications and for mass production a highly qualified beam is needed. As a first step we describe how a beam quality can be defined and as a second step a diagnostics for its verification and documentation is presented. Further we would like to introduce a system for automation of beam alignment in order to increase the reproducibility of electron beam processes. The monitoring system is not only applied for beam diagnostics but also for work piece observation with a CCD-camera or by back scattered electrons. The recording of back scattered electrons from a scanned electron beam is the basis of an on- and off-line seam tracking system. It can be used for precise work piece positioning as well as for process observation and documentation. The monitoring and quality control system is simple to be operated and records data that are easily to be interpreted for an ideal support of a high quality production.