Ultra-precise positioning with nanometric resolution using rolling guide way and leadscrew mechanism equipped with viscous-elastic element

摘要

A simple method is proposed here to improve the performance of a positioning system using rolling guide ways and leadscrew mechanisms. A passive device is developed which consists of an elastic element converting torsional moment into axial displacement and a viscous element to improve its damping capacity. Some experiments are performed on a positioning system using the mechanism equipped with the viscous-elastic element. It is demonstrated that the positioning system has nanometric resolution over a 200 mm stroke.