ZnO Thin Films Grown at Various Substrate Angles by Pulsed Laser Depositions

摘要

ZnO thin films were grown with different plume-substrate angles and growth times by pulsed laser deposition. The angles between plume propagation direction and substrate plane were changed from 0°, 45° to 90°. The growth time was changed in order to adjust film thickness. From the XRD pattern exhibiting dominant (002) XRD peak of ZnO, all films were found to be c-axis oriented. Optical property of ZnO thin films were investigated by PL (Photoluminescence). The ratio of UV/green luminescent intensity of ZnO thin film increased, as the angle between plume and substrate plane decrease from 90° to 0°.