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Fabrication of gratings on sol-gel-derived glass film by means of embossing without baking

机译:通过压花在不烘烤的情况下通过压花制造溶胶 - 凝胶衍生的玻璃膜上的制造

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In this paper, we report our success in the fabrication of optical diffractive gratings by means of direct embossing on sol-gel derived glasses. The sol-gel glass film is derived from composite organic-inorganic material with spin-coating. No baking is required during the whole processing. As a preliminary result, the grating with a period of 1.102 $mu@m and a thickness of 57.2 $mu@m has been successfully fabricated. Our experiments provide a simple and low temperature approach for fabricating optical gratings useful in integrated optics.
机译:在本文中,我们通过直接压花在溶胶 - 凝胶衍生的眼镜上报告了我们在光学衍射光栅的制造中的成功。溶胶 - 凝胶玻璃膜衍生自旋涂的复合有机 - 无机材料。整个处理过程中不需要烘烤。作为初步结果,已经成功地制造了一个时期的1.102 $ mu @ m和厚度为57.2 $ mu @ m的光栅。我们的实验提供了一种简单而低的温度方法,用于制造用于集成光学的光栅。

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